7/16/2011	12:06:06 AM	Helium valve opened
7/16/2011	12:07:18 AM	Helium valve closed
7/16/2011	12:07:45 AM	Main Vac valve closed
7/16/2011	12:07:53 AM	Main Vac valve opened
7/16/2011	12:09:16 AM	Recipe started at 12:09 AM
7/16/2011	12:09:16 AM	Helium valve closed
7/16/2011	12:09:16 AM	H2 valve closed
7/16/2011	12:09:16 AM	BCl3 valve closed
7/16/2011	12:09:16 AM	PH3 valve closed
7/16/2011	12:09:16 AM	SiCl4 pre valve closed
7/16/2011	12:09:16 AM	SiCl4 post valve closed
7/16/2011	12:09:16 AM	Main Vac valve closed
7/16/2011	12:09:16 AM	Bypass valve closed
7/16/2011	12:09:16 AM	Bubbler valve closed
7/16/2011	12:09:16 AM	Helium MFC set to  0.000000
7/16/2011	12:09:16 AM	H2 MFC set to  0.000000
7/16/2011	12:09:16 AM	BCl3 MFC set to  0.000000
7/16/2011	12:09:16 AM	PHl3 MFC set to  0.000000
7/16/2011	12:09:16 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:09:16 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:09:16 AM	Tube furnace set to 0
7/16/2011	12:09:19 AM	Helium valve closed
7/16/2011	12:09:19 AM	BCl3 valve closed
7/16/2011	12:09:19 AM	PH3 valve closed
7/16/2011	12:09:19 AM	SiCl4 pre valve closed
7/16/2011	12:09:19 AM	SiCl4 post valve closed
7/16/2011	12:09:19 AM	Main Vac valve closed
7/16/2011	12:09:19 AM	Bypass valve closed
7/16/2011	12:09:19 AM	Bubbler valve closed
7/16/2011	12:09:19 AM	H2 valve opened
7/16/2011	12:09:19 AM	Helium MFC set to  0.000000
7/16/2011	12:09:19 AM	H2 MFC set to  500.000000
7/16/2011	12:09:19 AM	BCl3 MFC set to  0.000000
7/16/2011	12:09:19 AM	PHl3 MFC set to  0.000000
7/16/2011	12:09:19 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:09:19 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:09:19 AM	Tube furnace set to 0
7/16/2011	12:10:21 AM	Helium valve closed
7/16/2011	12:10:21 AM	BCl3 valve closed
7/16/2011	12:10:21 AM	PH3 valve closed
7/16/2011	12:10:21 AM	SiCl4 pre valve closed
7/16/2011	12:10:21 AM	SiCl4 post valve closed
7/16/2011	12:10:21 AM	Main Vac valve closed
7/16/2011	12:10:21 AM	Bypass valve closed
7/16/2011	12:10:21 AM	H2 valve opened
7/16/2011	12:10:21 AM	Bubbler valve opened
7/16/2011	12:10:21 AM	Helium MFC set to  0.000000
7/16/2011	12:10:21 AM	H2 MFC set to  500.000000
7/16/2011	12:10:21 AM	BCl3 MFC set to  0.000000
7/16/2011	12:10:21 AM	PHl3 MFC set to  0.000000
7/16/2011	12:10:21 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:10:21 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:10:22 AM	Tube furnace set to 0
7/16/2011	12:10:23 AM	Helium valve closed
7/16/2011	12:10:23 AM	BCl3 valve closed
7/16/2011	12:10:23 AM	PH3 valve closed
7/16/2011	12:10:23 AM	SiCl4 pre valve closed
7/16/2011	12:10:23 AM	SiCl4 post valve closed
7/16/2011	12:10:23 AM	Main Vac valve closed
7/16/2011	12:10:23 AM	Bypass valve closed
7/16/2011	12:10:23 AM	H2 valve opened
7/16/2011	12:10:23 AM	Bubbler valve opened
7/16/2011	12:10:23 AM	Helium MFC set to  0.000000
7/16/2011	12:10:23 AM	H2 MFC set to  500.000000
7/16/2011	12:10:23 AM	BCl3 MFC set to  0.000000
7/16/2011	12:10:23 AM	PHl3 MFC set to  0.000000
7/16/2011	12:10:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:10:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:10:23 AM	Tube furnace set to 1000
7/16/2011	12:30:23 AM	Helium valve closed
7/16/2011	12:30:23 AM	BCl3 valve closed
7/16/2011	12:30:23 AM	Main Vac valve closed
7/16/2011	12:30:23 AM	Bypass valve closed
7/16/2011	12:30:23 AM	H2 valve opened
7/16/2011	12:30:23 AM	PH3 valve opened
7/16/2011	12:30:23 AM	SiCl4 pre valve opened
7/16/2011	12:30:23 AM	SiCl4 post valve opened
7/16/2011	12:30:23 AM	Bubbler valve opened
7/16/2011	12:30:23 AM	Helium MFC set to  0.000000
7/16/2011	12:30:23 AM	H2 MFC set to  500.000000
7/16/2011	12:30:23 AM	BCl3 MFC set to  0.000000
7/16/2011	12:30:23 AM	PHl3 MFC set to  0.500000
7/16/2011	12:30:23 AM	SiCl4 MFC set to  50.000000
7/16/2011	12:30:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:30:23 AM	Tube furnace set to 1000
7/16/2011	12:45:23 AM	Helium valve closed
7/16/2011	12:45:23 AM	BCl3 valve closed
7/16/2011	12:45:23 AM	PH3 valve closed
7/16/2011	12:45:23 AM	SiCl4 pre valve closed
7/16/2011	12:45:23 AM	SiCl4 post valve closed
7/16/2011	12:45:23 AM	Main Vac valve closed
7/16/2011	12:45:23 AM	Bypass valve closed
7/16/2011	12:45:23 AM	H2 valve opened
7/16/2011	12:45:23 AM	Bubbler valve opened
7/16/2011	12:45:23 AM	Helium MFC set to  0.000000
7/16/2011	12:45:23 AM	H2 MFC set to  500.000000
7/16/2011	12:45:23 AM	BCl3 MFC set to  0.000000
7/16/2011	12:45:23 AM	PHl3 MFC set to  0.000000
7/16/2011	12:45:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:45:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:45:23 AM	Tube furnace set to 950
7/16/2011	12:47:23 AM	Helium valve closed
7/16/2011	12:47:23 AM	BCl3 valve closed
7/16/2011	12:47:23 AM	PH3 valve closed
7/16/2011	12:47:23 AM	SiCl4 pre valve closed
7/16/2011	12:47:23 AM	SiCl4 post valve closed
7/16/2011	12:47:23 AM	Main Vac valve closed
7/16/2011	12:47:23 AM	Bypass valve closed
7/16/2011	12:47:23 AM	H2 valve opened
7/16/2011	12:47:23 AM	Bubbler valve opened
7/16/2011	12:47:23 AM	Helium MFC set to  0.000000
7/16/2011	12:47:23 AM	H2 MFC set to  500.000000
7/16/2011	12:47:23 AM	BCl3 MFC set to  0.000000
7/16/2011	12:47:23 AM	PHl3 MFC set to  0.000000
7/16/2011	12:47:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:47:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:47:23 AM	Tube furnace set to 900
7/16/2011	12:49:23 AM	Helium valve closed
7/16/2011	12:49:23 AM	BCl3 valve closed
7/16/2011	12:49:23 AM	PH3 valve closed
7/16/2011	12:49:23 AM	SiCl4 pre valve closed
7/16/2011	12:49:23 AM	SiCl4 post valve closed
7/16/2011	12:49:23 AM	Main Vac valve closed
7/16/2011	12:49:23 AM	Bypass valve closed
7/16/2011	12:49:23 AM	H2 valve opened
7/16/2011	12:49:23 AM	Bubbler valve opened
7/16/2011	12:49:23 AM	Helium MFC set to  0.000000
7/16/2011	12:49:23 AM	H2 MFC set to  500.000000
7/16/2011	12:49:23 AM	BCl3 MFC set to  0.000000
7/16/2011	12:49:23 AM	PHl3 MFC set to  0.000000
7/16/2011	12:49:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:49:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:49:23 AM	Tube furnace set to 850
7/16/2011	12:51:23 AM	H2 valve closed
7/16/2011	12:51:23 AM	BCl3 valve closed
7/16/2011	12:51:23 AM	PH3 valve closed
7/16/2011	12:51:23 AM	SiCl4 pre valve closed
7/16/2011	12:51:23 AM	SiCl4 post valve closed
7/16/2011	12:51:23 AM	Main Vac valve closed
7/16/2011	12:51:23 AM	Bypass valve closed
7/16/2011	12:51:23 AM	Helium valve opened
7/16/2011	12:51:23 AM	Bubbler valve opened
7/16/2011	12:51:23 AM	Helium MFC set to  500.000000
7/16/2011	12:51:23 AM	H2 MFC set to  0.000000
7/16/2011	12:51:23 AM	BCl3 MFC set to  0.000000
7/16/2011	12:51:23 AM	PHl3 MFC set to  0.000000
7/16/2011	12:51:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:51:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:51:24 AM	Tube furnace set to 800
7/16/2011	12:53:24 AM	H2 valve closed
7/16/2011	12:53:24 AM	BCl3 valve closed
7/16/2011	12:53:24 AM	PH3 valve closed
7/16/2011	12:53:24 AM	SiCl4 pre valve closed
7/16/2011	12:53:24 AM	SiCl4 post valve closed
7/16/2011	12:53:24 AM	Main Vac valve closed
7/16/2011	12:53:24 AM	Bypass valve closed
7/16/2011	12:53:24 AM	Helium valve opened
7/16/2011	12:53:24 AM	Bubbler valve opened
7/16/2011	12:53:24 AM	Helium MFC set to  500.000000
7/16/2011	12:53:24 AM	H2 MFC set to  0.000000
7/16/2011	12:53:24 AM	BCl3 MFC set to  0.000000
7/16/2011	12:53:24 AM	PHl3 MFC set to  0.000000
7/16/2011	12:53:24 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:53:24 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:53:24 AM	Tube furnace set to 750
7/16/2011	12:55:24 AM	H2 valve closed
7/16/2011	12:55:24 AM	BCl3 valve closed
7/16/2011	12:55:24 AM	PH3 valve closed
7/16/2011	12:55:24 AM	SiCl4 pre valve closed
7/16/2011	12:55:24 AM	SiCl4 post valve closed
7/16/2011	12:55:24 AM	Main Vac valve closed
7/16/2011	12:55:24 AM	Bypass valve closed
7/16/2011	12:55:24 AM	Helium valve opened
7/16/2011	12:55:24 AM	Bubbler valve opened
7/16/2011	12:55:24 AM	Helium MFC set to  500.000000
7/16/2011	12:55:24 AM	H2 MFC set to  0.000000
7/16/2011	12:55:24 AM	BCl3 MFC set to  0.000000
7/16/2011	12:55:24 AM	PHl3 MFC set to  0.000000
7/16/2011	12:55:24 AM	SiCl4 MFC set to  0.000000
7/16/2011	12:55:24 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	12:55:24 AM	Tube furnace set to 0
7/16/2011	1:15:24 AM	Helium valve closed
7/16/2011	1:15:24 AM	H2 valve closed
7/16/2011	1:15:24 AM	BCl3 valve closed
7/16/2011	1:15:24 AM	PH3 valve closed
7/16/2011	1:15:24 AM	SiCl4 pre valve closed
7/16/2011	1:15:24 AM	SiCl4 post valve closed
7/16/2011	1:15:24 AM	Main Vac valve closed
7/16/2011	1:15:24 AM	Bypass valve closed
7/16/2011	1:15:24 AM	Bubbler valve closed
7/16/2011	1:15:24 AM	Helium MFC set to  0.000000
7/16/2011	1:15:24 AM	H2 MFC set to  0.000000
7/16/2011	1:15:24 AM	BCl3 MFC set to  0.000000
7/16/2011	1:15:24 AM	PHl3 MFC set to  0.000000
7/16/2011	1:15:24 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:15:24 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:15:24 AM	Tube furnace set to 0
7/16/2011	1:15:25 AM	Run finished at 1:15 AM
7/16/2011	1:15:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2011	1:15:47 AM	Recipe started at 1:15 AM
7/16/2011	1:15:47 AM	Helium valve closed
7/16/2011	1:15:47 AM	H2 valve closed
7/16/2011	1:15:47 AM	BCl3 valve closed
7/16/2011	1:15:47 AM	PH3 valve closed
7/16/2011	1:15:47 AM	SiCl4 pre valve closed
7/16/2011	1:15:47 AM	SiCl4 post valve closed
7/16/2011	1:15:47 AM	Main Vac valve closed
7/16/2011	1:15:47 AM	Bypass valve closed
7/16/2011	1:15:47 AM	Bubbler valve closed
7/16/2011	1:15:47 AM	Helium MFC set to  0.000000
7/16/2011	1:15:47 AM	H2 MFC set to  0.000000
7/16/2011	1:15:47 AM	BCl3 MFC set to  0.000000
7/16/2011	1:15:47 AM	PHl3 MFC set to  0.000000
7/16/2011	1:15:47 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:15:47 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:15:47 AM	Tube furnace set to 0
7/16/2011	1:15:50 AM	H2 valve closed
7/16/2011	1:15:50 AM	BCl3 valve closed
7/16/2011	1:15:50 AM	PH3 valve closed
7/16/2011	1:15:50 AM	SiCl4 pre valve closed
7/16/2011	1:15:50 AM	SiCl4 post valve closed
7/16/2011	1:15:50 AM	Main Vac valve closed
7/16/2011	1:15:50 AM	Bypass valve closed
7/16/2011	1:15:50 AM	Bubbler valve closed
7/16/2011	1:15:50 AM	Helium valve opened
7/16/2011	1:15:50 AM	Helium MFC set to  500.000000
7/16/2011	1:15:50 AM	H2 MFC set to  0.000000
7/16/2011	1:15:50 AM	BCl3 MFC set to  0.000000
7/16/2011	1:15:50 AM	PHl3 MFC set to  0.000000
7/16/2011	1:15:50 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:15:50 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:15:51 AM	Tube furnace set to 0
7/16/2011	1:15:51 AM	Helium valve closed
7/16/2011	1:15:51 AM	H2 valve closed
7/16/2011	1:15:51 AM	BCl3 valve closed
7/16/2011	1:15:51 AM	PH3 valve closed
7/16/2011	1:15:51 AM	SiCl4 pre valve closed
7/16/2011	1:15:51 AM	SiCl4 post valve closed
7/16/2011	1:15:51 AM	Main Vac valve closed
7/16/2011	1:15:51 AM	Bypass valve closed
7/16/2011	1:15:51 AM	Bubbler valve closed
7/16/2011	1:15:51 AM	Helium MFC set to  0.000000
7/16/2011	1:15:51 AM	H2 MFC set to  0.000000
7/16/2011	1:15:51 AM	BCl3 MFC set to  0.000000
7/16/2011	1:15:51 AM	PHl3 MFC set to  0.000000
7/16/2011	1:15:51 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:15:51 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:15:51 AM	Tube furnace set to 0
7/16/2011	1:15:52 AM	Run finished at 1:15 AM
7/16/2011	1:15:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2011	1:18:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2011	1:18:38 AM	Recipe started at 1:18 AM
7/16/2011	1:18:38 AM	Helium valve closed
7/16/2011	1:18:38 AM	H2 valve closed
7/16/2011	1:18:38 AM	BCl3 valve closed
7/16/2011	1:18:38 AM	PH3 valve closed
7/16/2011	1:18:38 AM	SiCl4 pre valve closed
7/16/2011	1:18:38 AM	SiCl4 post valve closed
7/16/2011	1:18:38 AM	Main Vac valve closed
7/16/2011	1:18:38 AM	Bubbler valve closed
7/16/2011	1:18:38 AM	Bypass valve opened
7/16/2011	1:18:38 AM	Helium MFC set to  0.000000
7/16/2011	1:18:38 AM	H2 MFC set to  0.000000
7/16/2011	1:18:38 AM	BCl3 MFC set to  0.000000
7/16/2011	1:18:38 AM	PHl3 MFC set to  0.000000
7/16/2011	1:18:38 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:18:38 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:18:38 AM	Tube furnace set to 0
7/16/2011	1:19:37 AM	Helium valve closed
7/16/2011	1:19:37 AM	H2 valve closed
7/16/2011	1:19:37 AM	BCl3 valve closed
7/16/2011	1:19:37 AM	PH3 valve closed
7/16/2011	1:19:37 AM	SiCl4 pre valve closed
7/16/2011	1:19:37 AM	SiCl4 post valve closed
7/16/2011	1:19:37 AM	Main Vac valve closed
7/16/2011	1:19:37 AM	Bubbler valve closed
7/16/2011	1:19:37 AM	Bypass valve opened
7/16/2011	1:19:37 AM	Helium MFC set to  0.000000
7/16/2011	1:19:37 AM	H2 MFC set to  0.000000
7/16/2011	1:19:37 AM	BCl3 MFC set to  0.000000
7/16/2011	1:19:37 AM	PHl3 MFC set to  0.000000
7/16/2011	1:19:37 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:19:37 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:19:38 AM	Tube furnace set to 0
7/16/2011	1:20:38 AM	Helium valve closed
7/16/2011	1:20:38 AM	H2 valve closed
7/16/2011	1:20:38 AM	BCl3 valve closed
7/16/2011	1:20:38 AM	PH3 valve closed
7/16/2011	1:20:38 AM	SiCl4 pre valve closed
7/16/2011	1:20:38 AM	SiCl4 post valve closed
7/16/2011	1:20:38 AM	Bypass valve closed
7/16/2011	1:20:38 AM	Bubbler valve closed
7/16/2011	1:20:38 AM	Main Vac valve opened
7/16/2011	1:20:38 AM	Helium MFC set to  0.000000
7/16/2011	1:20:38 AM	H2 MFC set to  0.000000
7/16/2011	1:20:38 AM	BCl3 MFC set to  0.000000
7/16/2011	1:20:38 AM	PHl3 MFC set to  0.000000
7/16/2011	1:20:38 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:20:38 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:20:38 AM	Tube furnace set to 0
7/16/2011	1:20:39 AM	Run finished at 1:20 AM
7/16/2011	1:20:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2011	1:27:02 AM	Helium MFC set to  20.000000
7/16/2011	1:27:03 AM	Helium valve opened
7/16/2011	1:40:51 AM	Helium valve closed
7/16/2011	1:41:57 AM	Main Vac valve closed
7/16/2011	1:42:08 AM	Main Vac valve opened
7/16/2011	1:42:10 AM	Helium valve opened
7/16/2011	1:42:13 AM	Helium valve closed
7/16/2011	1:50:40 AM	Main Vac valve closed
7/16/2011	1:50:50 AM	Main Vac valve opened
7/16/2011	1:50:51 AM	Helium valve opened
7/16/2011	1:55:20 AM	Helium valve closed
7/16/2011	1:55:26 AM	Helium MFC set to  0.000000
7/16/2011	1:59:33 AM	Recipe started at 1:59 AM
7/16/2011	1:59:33 AM	Helium valve closed
7/16/2011	1:59:33 AM	H2 valve closed
7/16/2011	1:59:33 AM	BCl3 valve closed
7/16/2011	1:59:33 AM	PH3 valve closed
7/16/2011	1:59:33 AM	SiCl4 pre valve closed
7/16/2011	1:59:33 AM	SiCl4 post valve closed
7/16/2011	1:59:34 AM	Main Vac valve closed
7/16/2011	1:59:34 AM	Bypass valve closed
7/16/2011	1:59:34 AM	Bubbler valve closed
7/16/2011	1:59:34 AM	Helium MFC set to  0.000000
7/16/2011	1:59:34 AM	H2 MFC set to  0.000000
7/16/2011	1:59:34 AM	BCl3 MFC set to  0.000000
7/16/2011	1:59:34 AM	PHl3 MFC set to  0.000000
7/16/2011	1:59:34 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:59:34 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:59:34 AM	Tube furnace set to 0
7/16/2011	1:59:37 AM	Helium valve closed
7/16/2011	1:59:37 AM	BCl3 valve closed
7/16/2011	1:59:37 AM	PH3 valve closed
7/16/2011	1:59:37 AM	SiCl4 pre valve closed
7/16/2011	1:59:37 AM	SiCl4 post valve closed
7/16/2011	1:59:37 AM	Main Vac valve closed
7/16/2011	1:59:37 AM	Bypass valve closed
7/16/2011	1:59:37 AM	Bubbler valve closed
7/16/2011	1:59:37 AM	H2 valve opened
7/16/2011	1:59:37 AM	Helium MFC set to  0.000000
7/16/2011	1:59:37 AM	H2 MFC set to  500.000000
7/16/2011	1:59:37 AM	BCl3 MFC set to  0.000000
7/16/2011	1:59:37 AM	PHl3 MFC set to  0.000000
7/16/2011	1:59:37 AM	SiCl4 MFC set to  0.000000
7/16/2011	1:59:37 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	1:59:37 AM	Tube furnace set to 0
7/16/2011	2:00:40 AM	Helium valve closed
7/16/2011	2:00:40 AM	BCl3 valve closed
7/16/2011	2:00:40 AM	PH3 valve closed
7/16/2011	2:00:40 AM	SiCl4 pre valve closed
7/16/2011	2:00:40 AM	SiCl4 post valve closed
7/16/2011	2:00:40 AM	Main Vac valve closed
7/16/2011	2:00:40 AM	Bypass valve closed
7/16/2011	2:00:40 AM	H2 valve opened
7/16/2011	2:00:40 AM	Bubbler valve opened
7/16/2011	2:00:40 AM	Helium MFC set to  0.000000
7/16/2011	2:00:40 AM	H2 MFC set to  500.000000
7/16/2011	2:00:40 AM	BCl3 MFC set to  0.000000
7/16/2011	2:00:40 AM	PHl3 MFC set to  0.000000
7/16/2011	2:00:40 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:00:40 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:00:40 AM	Tube furnace set to 0
7/16/2011	2:00:41 AM	Helium valve closed
7/16/2011	2:00:41 AM	BCl3 valve closed
7/16/2011	2:00:41 AM	PH3 valve closed
7/16/2011	2:00:41 AM	SiCl4 pre valve closed
7/16/2011	2:00:41 AM	SiCl4 post valve closed
7/16/2011	2:00:41 AM	Main Vac valve closed
7/16/2011	2:00:41 AM	Bypass valve closed
7/16/2011	2:00:41 AM	H2 valve opened
7/16/2011	2:00:41 AM	Bubbler valve opened
7/16/2011	2:00:41 AM	Helium MFC set to  0.000000
7/16/2011	2:00:41 AM	H2 MFC set to  500.000000
7/16/2011	2:00:41 AM	BCl3 MFC set to  0.000000
7/16/2011	2:00:41 AM	PHl3 MFC set to  0.000000
7/16/2011	2:00:41 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:00:41 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:00:41 AM	Tube furnace set to 1000
7/16/2011	2:20:41 AM	Helium valve closed
7/16/2011	2:20:41 AM	BCl3 valve closed
7/16/2011	2:20:41 AM	Main Vac valve closed
7/16/2011	2:20:41 AM	Bypass valve closed
7/16/2011	2:20:41 AM	H2 valve opened
7/16/2011	2:20:41 AM	PH3 valve opened
7/16/2011	2:20:41 AM	SiCl4 pre valve opened
7/16/2011	2:20:41 AM	SiCl4 post valve opened
7/16/2011	2:20:41 AM	Bubbler valve opened
7/16/2011	2:20:41 AM	Helium MFC set to  0.000000
7/16/2011	2:20:41 AM	H2 MFC set to  500.000000
7/16/2011	2:20:41 AM	BCl3 MFC set to  0.000000
7/16/2011	2:20:41 AM	PHl3 MFC set to  2.000000
7/16/2011	2:20:41 AM	SiCl4 MFC set to  50.000000
7/16/2011	2:20:41 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:20:41 AM	Tube furnace set to 1000
7/16/2011	2:36:41 AM	Helium valve closed
7/16/2011	2:36:41 AM	BCl3 valve closed
7/16/2011	2:36:41 AM	PH3 valve closed
7/16/2011	2:36:41 AM	SiCl4 pre valve closed
7/16/2011	2:36:41 AM	SiCl4 post valve closed
7/16/2011	2:36:41 AM	Main Vac valve closed
7/16/2011	2:36:41 AM	Bypass valve closed
7/16/2011	2:36:41 AM	H2 valve opened
7/16/2011	2:36:41 AM	Bubbler valve opened
7/16/2011	2:36:41 AM	Helium MFC set to  0.000000
7/16/2011	2:36:41 AM	H2 MFC set to  500.000000
7/16/2011	2:36:41 AM	BCl3 MFC set to  0.000000
7/16/2011	2:36:41 AM	PHl3 MFC set to  0.000000
7/16/2011	2:36:41 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:36:41 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:36:41 AM	Tube furnace set to 950
7/16/2011	2:38:41 AM	Helium valve closed
7/16/2011	2:38:41 AM	BCl3 valve closed
7/16/2011	2:38:41 AM	PH3 valve closed
7/16/2011	2:38:41 AM	SiCl4 pre valve closed
7/16/2011	2:38:41 AM	SiCl4 post valve closed
7/16/2011	2:38:41 AM	Main Vac valve closed
7/16/2011	2:38:41 AM	Bypass valve closed
7/16/2011	2:38:41 AM	H2 valve opened
7/16/2011	2:38:41 AM	Bubbler valve opened
7/16/2011	2:38:41 AM	Helium MFC set to  0.000000
7/16/2011	2:38:41 AM	H2 MFC set to  500.000000
7/16/2011	2:38:41 AM	BCl3 MFC set to  0.000000
7/16/2011	2:38:41 AM	PHl3 MFC set to  0.000000
7/16/2011	2:38:41 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:38:41 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:38:42 AM	Tube furnace set to 900
7/16/2011	2:39:00 AM	Helium valve closed
7/16/2011	2:39:00 AM	BCl3 valve closed
7/16/2011	2:39:00 AM	PH3 valve closed
7/16/2011	2:39:00 AM	SiCl4 pre valve closed
7/16/2011	2:39:00 AM	SiCl4 post valve closed
7/16/2011	2:39:00 AM	Main Vac valve closed
7/16/2011	2:39:00 AM	Bypass valve closed
7/16/2011	2:39:00 AM	H2 valve opened
7/16/2011	2:39:00 AM	Bubbler valve opened
7/16/2011	2:39:00 AM	Helium MFC set to  0.000000
7/16/2011	2:39:00 AM	H2 MFC set to  500.000000
7/16/2011	2:39:00 AM	BCl3 MFC set to  0.000000
7/16/2011	2:39:00 AM	PHl3 MFC set to  0.000000
7/16/2011	2:39:00 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:39:00 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:39:01 AM	Tube furnace set to 850
7/16/2011	2:40:23 AM	H2 valve closed
7/16/2011	2:40:23 AM	BCl3 valve closed
7/16/2011	2:40:23 AM	PH3 valve closed
7/16/2011	2:40:23 AM	SiCl4 pre valve closed
7/16/2011	2:40:23 AM	SiCl4 post valve closed
7/16/2011	2:40:23 AM	Main Vac valve closed
7/16/2011	2:40:23 AM	Bypass valve closed
7/16/2011	2:40:23 AM	Helium valve opened
7/16/2011	2:40:23 AM	Bubbler valve opened
7/16/2011	2:40:23 AM	Helium MFC set to  500.000000
7/16/2011	2:40:23 AM	H2 MFC set to  0.000000
7/16/2011	2:40:23 AM	BCl3 MFC set to  0.000000
7/16/2011	2:40:23 AM	PHl3 MFC set to  0.000000
7/16/2011	2:40:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:40:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:40:23 AM	Tube furnace set to 800
7/16/2011	2:40:54 AM	H2 valve closed
7/16/2011	2:40:54 AM	BCl3 valve closed
7/16/2011	2:40:54 AM	PH3 valve closed
7/16/2011	2:40:54 AM	SiCl4 pre valve closed
7/16/2011	2:40:54 AM	SiCl4 post valve closed
7/16/2011	2:40:54 AM	Main Vac valve closed
7/16/2011	2:40:54 AM	Bypass valve closed
7/16/2011	2:40:54 AM	Helium valve opened
7/16/2011	2:40:54 AM	Bubbler valve opened
7/16/2011	2:40:54 AM	Helium MFC set to  500.000000
7/16/2011	2:40:54 AM	H2 MFC set to  0.000000
7/16/2011	2:40:54 AM	BCl3 MFC set to  0.000000
7/16/2011	2:40:54 AM	PHl3 MFC set to  0.000000
7/16/2011	2:40:54 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:40:54 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:40:54 AM	Tube furnace set to 750
7/16/2011	2:41:01 AM	H2 valve closed
7/16/2011	2:41:01 AM	BCl3 valve closed
7/16/2011	2:41:01 AM	PH3 valve closed
7/16/2011	2:41:01 AM	SiCl4 pre valve closed
7/16/2011	2:41:01 AM	SiCl4 post valve closed
7/16/2011	2:41:01 AM	Main Vac valve closed
7/16/2011	2:41:01 AM	Bypass valve closed
7/16/2011	2:41:01 AM	Helium valve opened
7/16/2011	2:41:01 AM	Bubbler valve opened
7/16/2011	2:41:01 AM	Helium MFC set to  500.000000
7/16/2011	2:41:01 AM	H2 MFC set to  0.000000
7/16/2011	2:41:01 AM	BCl3 MFC set to  0.000000
7/16/2011	2:41:01 AM	PHl3 MFC set to  0.000000
7/16/2011	2:41:01 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:41:01 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:41:01 AM	Tube furnace set to 0
7/16/2011	2:56:23 AM	Helium valve closed
7/16/2011	2:56:23 AM	H2 valve closed
7/16/2011	2:56:23 AM	BCl3 valve closed
7/16/2011	2:56:23 AM	PH3 valve closed
7/16/2011	2:56:23 AM	SiCl4 pre valve closed
7/16/2011	2:56:23 AM	SiCl4 post valve closed
7/16/2011	2:56:23 AM	Main Vac valve closed
7/16/2011	2:56:23 AM	Bypass valve closed
7/16/2011	2:56:23 AM	Bubbler valve closed
7/16/2011	2:56:23 AM	Helium MFC set to  0.000000
7/16/2011	2:56:23 AM	H2 MFC set to  0.000000
7/16/2011	2:56:23 AM	BCl3 MFC set to  0.000000
7/16/2011	2:56:23 AM	PHl3 MFC set to  0.000000
7/16/2011	2:56:23 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:56:23 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:56:24 AM	Tube furnace set to 0
7/16/2011	2:56:25 AM	Run finished at 2:56 AM
7/16/2011	2:56:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2011	2:56:36 AM	Recipe started at 2:56 AM
7/16/2011	2:56:36 AM	Helium valve closed
7/16/2011	2:56:36 AM	H2 valve closed
7/16/2011	2:56:36 AM	BCl3 valve closed
7/16/2011	2:56:36 AM	PH3 valve closed
7/16/2011	2:56:36 AM	SiCl4 pre valve closed
7/16/2011	2:56:36 AM	SiCl4 post valve closed
7/16/2011	2:56:36 AM	Main Vac valve closed
7/16/2011	2:56:36 AM	Bypass valve closed
7/16/2011	2:56:36 AM	Bubbler valve closed
7/16/2011	2:56:36 AM	Helium MFC set to  0.000000
7/16/2011	2:56:36 AM	H2 MFC set to  0.000000
7/16/2011	2:56:36 AM	BCl3 MFC set to  0.000000
7/16/2011	2:56:36 AM	PHl3 MFC set to  0.000000
7/16/2011	2:56:36 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:56:36 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:56:36 AM	Tube furnace set to 0
7/16/2011	2:56:39 AM	H2 valve closed
7/16/2011	2:56:39 AM	BCl3 valve closed
7/16/2011	2:56:39 AM	PH3 valve closed
7/16/2011	2:56:39 AM	SiCl4 pre valve closed
7/16/2011	2:56:39 AM	SiCl4 post valve closed
7/16/2011	2:56:39 AM	Main Vac valve closed
7/16/2011	2:56:39 AM	Bypass valve closed
7/16/2011	2:56:39 AM	Bubbler valve closed
7/16/2011	2:56:39 AM	Helium valve opened
7/16/2011	2:56:39 AM	Helium MFC set to  500.000000
7/16/2011	2:56:39 AM	H2 MFC set to  0.000000
7/16/2011	2:56:39 AM	BCl3 MFC set to  0.000000
7/16/2011	2:56:39 AM	PHl3 MFC set to  0.000000
7/16/2011	2:56:39 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:56:39 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:56:39 AM	Tube furnace set to 0
7/16/2011	2:56:40 AM	Helium valve closed
7/16/2011	2:56:40 AM	H2 valve closed
7/16/2011	2:56:40 AM	BCl3 valve closed
7/16/2011	2:56:40 AM	PH3 valve closed
7/16/2011	2:56:40 AM	SiCl4 pre valve closed
7/16/2011	2:56:40 AM	SiCl4 post valve closed
7/16/2011	2:56:40 AM	Main Vac valve closed
7/16/2011	2:56:40 AM	Bypass valve closed
7/16/2011	2:56:40 AM	Bubbler valve closed
7/16/2011	2:56:40 AM	Helium MFC set to  0.000000
7/16/2011	2:56:40 AM	H2 MFC set to  0.000000
7/16/2011	2:56:40 AM	BCl3 MFC set to  0.000000
7/16/2011	2:56:40 AM	PHl3 MFC set to  0.000000
7/16/2011	2:56:40 AM	SiCl4 MFC set to  0.000000
7/16/2011	2:56:40 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	2:56:40 AM	Tube furnace set to 0
7/16/2011	2:56:41 AM	Run finished at 2:56 AM
7/16/2011	2:56:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2011	3:01:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2011	3:01:48 AM	Recipe started at 3:01 AM
7/16/2011	3:01:48 AM	Helium valve closed
7/16/2011	3:01:48 AM	H2 valve closed
7/16/2011	3:01:48 AM	BCl3 valve closed
7/16/2011	3:01:48 AM	PH3 valve closed
7/16/2011	3:01:48 AM	SiCl4 pre valve closed
7/16/2011	3:01:48 AM	SiCl4 post valve closed
7/16/2011	3:01:48 AM	Main Vac valve closed
7/16/2011	3:01:48 AM	Bubbler valve closed
7/16/2011	3:01:48 AM	Bypass valve opened
7/16/2011	3:01:48 AM	Helium MFC set to  0.000000
7/16/2011	3:01:48 AM	H2 MFC set to  0.000000
7/16/2011	3:01:48 AM	BCl3 MFC set to  0.000000
7/16/2011	3:01:48 AM	PHl3 MFC set to  0.000000
7/16/2011	3:01:48 AM	SiCl4 MFC set to  0.000000
7/16/2011	3:01:48 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	3:01:48 AM	Tube furnace set to 0
7/16/2011	3:02:52 AM	Helium valve closed
7/16/2011	3:02:52 AM	H2 valve closed
7/16/2011	3:02:52 AM	BCl3 valve closed
7/16/2011	3:02:52 AM	PH3 valve closed
7/16/2011	3:02:52 AM	SiCl4 pre valve closed
7/16/2011	3:02:52 AM	SiCl4 post valve closed
7/16/2011	3:02:52 AM	Main Vac valve closed
7/16/2011	3:02:52 AM	Bubbler valve closed
7/16/2011	3:02:52 AM	Bypass valve opened
7/16/2011	3:02:52 AM	Helium MFC set to  0.000000
7/16/2011	3:02:52 AM	H2 MFC set to  0.000000
7/16/2011	3:02:52 AM	BCl3 MFC set to  0.000000
7/16/2011	3:02:52 AM	PHl3 MFC set to  0.000000
7/16/2011	3:02:52 AM	SiCl4 MFC set to  0.000000
7/16/2011	3:02:52 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	3:02:52 AM	Tube furnace set to 0
7/16/2011	3:03:52 AM	Helium valve closed
7/16/2011	3:03:52 AM	H2 valve closed
7/16/2011	3:03:52 AM	BCl3 valve closed
7/16/2011	3:03:52 AM	PH3 valve closed
7/16/2011	3:03:52 AM	SiCl4 pre valve closed
7/16/2011	3:03:52 AM	SiCl4 post valve closed
7/16/2011	3:03:52 AM	Bypass valve closed
7/16/2011	3:03:52 AM	Bubbler valve closed
7/16/2011	3:03:52 AM	Main Vac valve opened
7/16/2011	3:03:52 AM	Helium MFC set to  0.000000
7/16/2011	3:03:52 AM	H2 MFC set to  0.000000
7/16/2011	3:03:52 AM	BCl3 MFC set to  0.000000
7/16/2011	3:03:52 AM	PHl3 MFC set to  0.000000
7/16/2011	3:03:52 AM	SiCl4 MFC set to  0.000000
7/16/2011	3:03:52 AM	Bypass solenoid MFC set to  0.000000
7/16/2011	3:03:52 AM	Tube furnace set to 0
7/16/2011	3:03:53 AM	Run finished at 3:03 AM
7/16/2011	3:03:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2011	3:05:11 AM	Main Vac valve closed
7/16/2011	3:05:22 AM	Main Vac valve opened
